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Scanning confocal electron microscopy
Scanning confocal electron microscopy (SCEM) is an electron microscopy technique analogous to scanning confocal optical microscopy (SCOM). In this technique, the studied sample is illuminated by a focussed electron beam, as in other scanning microscopy techniques, such as scanning transmission electron microscopy or scanning electron microscopy. However, in SCEM, the collection optics is arranged symmetrically to the illumination optics to gather only the electrons that pass the beam focus. This results in superior depth resolution of the imaging. The technique is relatively new and is being actively developed.
== History ==
The idea of SCEM logically follows from SCOM and thus is rather old. However, practical design and construction of scanning confocal electron microscope is a complex problem first solved by Nestor J. Zaluzec.〔Zaluzec, N.J. (2003) "Scanning confocal electron microscope" 〕 His first scanning confocal electron microscope demonstrated the 3D properties of the SCEM, but have not realized the sub-nanometer lateral spatial resolution achievable with high-energy electrons (lateral resolution of only ~80 nm has been demonstrated). Several groups are currently working on construction of atomic resolution SCEM.〔(【引用サイトリンク】 title =Dr. Peter Nellist )〕 In particular, atomically resolved SCEM images have already been obtained
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